Capabilities:
– Standard SEM imaging with a field emission gun
– Cryo-SEM
Cost:
Standard SEM: BIF members: $39.60/h, Academic users: $66/h, Industry users: $120/h
Cryo-SEM: BIF members: $330/day, Academic users: $550/day, Industry users: $960/day
Specifications:
Electron Source: Cold field emission gun producing high brightness (2 x 109 A/cm2/sr) with little energy spread (0.2 – 0.3 eV)
Accelerating Voltage: 0.5 – 30 KV
Magnification: 30 – 500,000x
Maximum 1.5 nm resolution at 15 kV, 12 mm Working Distance (WD)/ Maximum 2.5 nm resolution at 1 kV, 2.5 mm WD
Specimen stage tilts from -5° – 360°
Two Secondary Electrons (SEs) and one Back-Scattered Electrons (BSEs) detectors are available